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Structural and photoluminescent properties of ZnO films deposited by radio frequency reactive sputtering

โœ Scribed by XingPing Peng; ZhiGuang Wang; Yin Song; Tao Ji; Hang Zang; Yinghu Yang; YunFan Jin


Book ID
107360123
Publisher
Science in China Press (SCP)
Year
2007
Tongue
English
Weight
722 KB
Volume
50
Category
Article
ISSN
1672-1799

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Applications insulated metal substrates (IMS) for high-density and high-power mounting are greatly extending with miniaturizing of electronic components. Recently, aluminum nitride film has been used as a potential insulator and/or passivation material in insulated metal substrate because of its hig