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The effect of deposition conditions on structure properties of radio frequency reactive sputtered polycrystalline ZnO films

โœ Scribed by Hengxiang Gong; Yinyue Wang; Zhijun Yan; Yinghu Yang

Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
101 KB
Volume
5
Category
Article
ISSN
1369-8001

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Applications insulated metal substrates (IMS) for high-density and high-power mounting are greatly extending with miniaturizing of electronic components. Recently, aluminum nitride film has been used as a potential insulator and/or passivation material in insulated metal substrate because of its hig