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Structure and mechanical properties of nc-TiC/a-C:H nanocomposite films deposited by filtered cathodic arc technique

โœ Scribed by Zhai, Yu-Hao; Zhang, Yu-Juan; Peng, Yi; Zhang, Sheng-Mao; Zhang, Ping-Yu; Zhang, Xiao-Min


Book ID
121511129
Publisher
Nonferrous Metals Society of China
Year
2014
Tongue
English
Weight
414 KB
Volume
35
Category
Article
ISSN
1001-0521

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Superhard nanocomposite nc-TiC/a-C:H fil
โœ Yaohui Wang; Xu Zhang; Xianying Wu; Huixing Zhang; Xiaoji Zhang ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 458 KB

Superhard nanocomposite nc-TiC/a-C:H films, with an excellent combination of high elastic recovery, low friction coefficient and good H/E ratio, were prepared by filtered cathodic vacuum arc technique using the C 2 H 2 gas as the precursor. The effect of C 2 H 2 flow rate on the microstructure, phas