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Microstructure and Platelet Adhesion Behavior of Titanium Oxide Films Synthesized by Reactive High-Power Pulse Magnetron Sputtering

✍ Scribed by Yin, Tai-Lei; Jing, Feng-Juan; Sun, Hong; Leng, Yongxiang; Yukimura, Ken; Huang, Nan


Book ID
121753775
Publisher
IEEE
Year
2013
Tongue
English
Weight
942 KB
Volume
41
Category
Article
ISSN
0093-3813

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In this work thin silver (Ag) films are grown employing high power pulsed magnetron sputtering (HPPMS) for various pulse on/off time configurations, as well as by dc magnetron sputtering (dcMS), for reference. It is shown that the increase of the pulse off-time from 450 ΞΌs to 3450 ΞΌs, while the puls