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Microstructural properties of dc magnetron sputtered a-Si:H by IR spectroscopy

✍ Scribed by Davor Gracin; UrošV. Desnica; Mile Ivanda


Book ID
115988388
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
498 KB
Volume
149
Category
Article
ISSN
0022-3093

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Structural and optical properties of a-S
✍ Aïssa Keffous; Abdelhak Cheriet; Youcef Belkacem; Noureddine Gabouze; Assia Bouk 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 731 KB

Hydrogenated amorphous SiC films (a-Si 1-x C x :H) were prepared by dc magnetron sputtering technique on p-type Si(1 0 0) and corning 9075 substrates at low temperature, by using 32 sprigs of silicon carbide (6H-SiC). The deposited a-Si 1-x C x :H film was realized under a mixture of argon and hydro