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IR Spectroscopy and Structure of RF Magnetron Sputtered a-SiC:H Films

✍ Scribed by H. Rübel; B. Schröder; W. Fuhs; J. Krauskopf; T. Rupp; K. Bethge

Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
850 KB
Volume
139
Category
Article
ISSN
0370-1972

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