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Photoconductive a-Si: H with dominant monohydride bonding prepared by DC-Magnetron sputtering

✍ Scribed by Drüsedau, T. ;Eckler, M. ;Bindemann, R.


Publisher
John Wiley and Sons
Year
1988
Tongue
English
Weight
576 KB
Volume
108
Category
Article
ISSN
0031-8965

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## Abstract In this study, the deposition temperature effects on the properties of hydrogenated amorphous silicon films are reported. The a‐Si:H thin films were deposited by DC magnetron sputtering technique, according to a new protocol of deposition. This last consists of a successively several th