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Investigation of nitrogen incorporation into a-Si:H prepared by dc-magnetron sputtering

✍ Scribed by T. Druesedau; St. Jaeger; H. Fiedler; H. Sobotta; V. Riede; R. Boettcher; A. Witzmann

Book ID
115987918
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
587 KB
Volume
127
Category
Article
ISSN
0022-3093

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