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Nitrogen incorporation into boron carbide films deposited by dc-magnetron sputtering: film microstructure and tribological properties

✍ Scribed by D.C Reigada; F.L Freire Jr.


Book ID
108422906
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
398 KB
Volume
142-144
Category
Article
ISSN
0257-8972

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Carbon nitride (CN x /CN x ) multilayers with sequential sp 3 -rich and sp 2 -rich layers were deposited on c-Si substrate by direct current magnetron sputtering. The composition, microstructure and morphology of the films were investigated by the X-ray photoelectron spectroscopy and transmission el