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Microstructural observations of Ta/Al superlattices by TEM

✍ Scribed by Jiang, S. S. ;Zou, J. ;Cockayne, D. J. H. ;Sikorski, A. ;Hu, A. ;Peng, R. W.

Book ID: 105383132
Publisher: John Wiley and Sons
Year: 1992
Tongue: English
Weight: 571 KB
Volume: 130
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211300214

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## Abstract Co doped C films with different Co volume fraction __x__~v~ were fabricated using facing‐target sputtering at room temperature. The as‐deposited films are composed of ∼2 nm amorphous Co granules dispersed in a‐C matrix, and their morphology is composition independent. The graphitized ca