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Microstructural and dielectric properties of BaTiO3 thin films prepared by atom beam sputtering

โœ Scribed by H. Kawano; K. Morii; Y. Nakayama

Book ID
119124514
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
536 KB
Volume
12
Category
Article
ISSN
0167-577X

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Properties of Dielectric BaTiO 3 Thin Films Prepared by Spray Pyrolysis. -Both smooth and highly porous films are deposited depending on deposition temp. and rate. As-deposited films contain an unidentified, low-symmetry Ba titanate modification. Annealing at 500-900 โ€ข C converts the films to the cu