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Microscopic properties of H2 diluted HWCVD deposited a-SiC:H film

โœ Scribed by Bibhu P. Swain; Rajiv O. Dusane


Book ID
108207527
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
156 KB
Volume
83
Category
Article
ISSN
0167-9317

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