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Micromechanically structurized sensors on GaAs: An integrated anemometer

✍ Scribed by K. Fricke; H.L. Hartnagel; S. Ritter; J. Würfl

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
217 KB
Volume
19
Category
Article
ISSN
0167-9317

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