Design and investigation of micromechanical bridge structures for an optical pressure sensor with temperature compensation
✍ Scribed by H. Bartelt; H. Unzeitig
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 457 KB
- Volume
- 37-38
- Category
- Article
- ISSN
- 0924-4247
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✦ Synopsis
For fibre-opt& sensor systems, a frequencyencoded sensor signal IS of great interest due to its mununrty against attenuation effects along the fibre-optic transrmsslon lme A possible approach for such sensors IS the use of &con mlcromechamcal bndges with optothermal exntation and an mterferometnc measurmg technique A problem with such sensors 1s the cross-sensltlvlty to other parameters, especially to temperature We have deslgned and reahzd a structure wth two resonant bndges made of slhcon ndnde to allow temperature compensation of a pressure measurement By this method it 1s possible to reduce the temperature dependence of the pressure sensor to less than 1% wthm the temperature range used