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A micromachined mass-flow sensor with integrated electronics on GaAs

✍ Scribed by K. Fricke


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
334 KB
Volume
45
Category
Article
ISSN
0924-4247

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✦ Synopsis


An integrated mass-flow sensor on GaAs based on the principle of convective heat transfer has been developed. An AlGaAs etch-stop layer is used for the fabrication of the membrane for thermal isolation of the heater. The temperature of the mesatype heating resistor is measured by cascaded thermopiles. A differential MESFET amplifier is integrated for on-chip amplification and impedance transformation. Measurements show that the mass-flow sensor can be used up to an ambient temperature of 300 OC.


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