✦ LIBER ✦

A micromachined mass-flow sensor with integrated electronics on GaAs

✍ Scribed by K. Fricke

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 334 KB
Volume: 45
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(94)0821x-h

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✦ Synopsis

An integrated mass-flow sensor on GaAs based on the principle of convective heat transfer has been developed. An AlGaAs etch-stop layer is used for the fabrication of the membrane for thermal isolation of the heater. The temperature of the mesatype heating resistor is measured by cascaded thermopiles. A differential MESFET amplifier is integrated for on-chip amplification and impedance transformation. Measurements show that the mass-flow sensor can be used up to an ambient temperature of 300 OC.

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