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Micromachining of silicon with a proton microbeam

✍ Scribed by P Polesello; C Manfredotti; F Fizzotti; R Lu; E Vittone; G Lerondel; A.M Rossi; G Amato; L Boarino; S Galassini; M Jaksic; Z Pastuovic

Book ID
114171439
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
640 KB
Volume
158
Category
Article
ISSN
0168-583X

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