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3D micromachining of SU-8 polymer with proton microbeam

✍ Scribed by J. Simčič; P. Pelicon; Z. Rupnik; M. Mihelič; A. Razpet; D. Jenko; M. Maček


Book ID
103860543
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
395 KB
Volume
241
Category
Article
ISSN
0168-583X

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