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Bonding, exposing and transferring technique in SU-8 and SU-8 laser micromachining combination for 3D, free-standing and multilevel microstructures

✍ Scribed by Medina, D.; Perdigones, F.; García, J.; Luque, A.; Quero, J.M.


Book ID
114461818
Publisher
The Institution of Engineering and Technology
Year
2012
Tongue
English
Weight
229 KB
Volume
7
Category
Article
ISSN
1750-0443

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