Concept for processing of silicon check valves by proton beam micromachining

✍ Scribed by Cs. Dücso˝; I. Rajta; P. Fürjes; E. Baradács

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 800 KB
• Volume: 260
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2007.02.054