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Micromachined silicon cantilever beams for thin-film stress measurement

✍ Scribed by G.F. Cardinale; D.G. Howitt; W.M. Clift; K.F. McCarty; D.L. Medlin; P.B. Mirkarimi; N.R. Moody

Book ID
108388895
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
963 KB
Volume
287
Category
Article
ISSN
0040-6090

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Excimer laser ablation of PZT thin films
Excimer laser ablation of PZT thin films on silicon cantilever beams
✍ Jyrki Lappalainen; Johannes Frantti; Hannu Moilanen; Seppo LeppΓ€vuori πŸ“‚ Article πŸ“… 1995 πŸ› Elsevier Science 🌐 English βš– 474 KB

Laser ablation was used to realise piezoelectric films for use in a low-voltage cantilever bimorph actuator structure. Neodymiumdoped lead zirconium titanate (PZT) targets were ablated by a pulsed \(\mathrm{XeCl}\) excimer laser (wavelength \(308 \mathrm{~nm}\) ). The deposited films showed a better