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Analysis of residual stress in cubic boron nitride thin films using micromachined cantilever beams

✍ Scribed by Cardinale, G.F.; Howitt, D.G.; McCarty, K.F.; Medlin, D.L.; Mirkarimi, P.B.; Moody, N.R.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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✍ Fang, W; Wickert, J A 📂 Article 📅 1996 🏛 Institute of Physics 🌐 English ⚖ 365 KB

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✍ M Zeitler; S Sienz; H Neumann; M Zeuner; J.W Gerlach; B Rauschenbach 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 123 KB

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✍ K.J. Kang; N. Yao; M.Y. He; A.G. Evans 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 747 KB