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Mapping of mechanical stress in silicon thin films on silicon cantilevers by Raman microspectroscopy

✍ Scribed by A. Vetushka; M. Ledinský; J. Stuchlík; T. Mates; A. Fejfar; J. Kočka


Book ID
116670918
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
426 KB
Volume
354
Category
Article
ISSN
0022-3093

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