𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Micromachined Fabry–Perot interferometer for motion detection

✍ Scribed by Waters, Richard L.; Aklufi, Monti E.

Book ID
120509490
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
418 KB
Volume
81
Category
Article
ISSN
0003-6951

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Electrically tunable surface micromachin
Electrically tunable surface micromachined Fabry–Perot interferometer for visible light
✍ M. Blomberg; H. Kattelus; A. Miranto 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 369 KB

We present a new kind of electrostatically tunable surface micromachined Fabry-Perot interferometer (FPI) structure and a process flow which was successfully used to fabricate devices for visible wavelength range. The novel fabrication process is based on using polymeric sacrificial layer. Fabricate