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Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light

✍ Scribed by M. Blomberg; H. Kattelus; A. Miranto

Book ID: 108254882
Publisher: Elsevier
Year: 2009
Weight: 136 KB
Volume: 1
Category: Article
ISSN: 1876-6196
DOI: 10.1016/j.proche.2009.07.138

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