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Tunable Fabry-Perot surface micromachined interferometer-experiments and modeling

✍ Scribed by Raluca Müller; Dana Cristea; C. Tibeica; P. Arguel; P. Pons; F. Rossel; D. Syvridis; M. Kusko

Publisher
Springer-Verlag
Year
2005
Tongue
English
Weight
455 KB
Volume
12
Category
Article
ISSN
0946-7076

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