✦ LIBER ✦
Wide range electrostatic MEMS Fabry Perot optical tunable filter: modelling an electrostatic and mechanic beam deflection
✍ Scribed by Nor Hafizah Ngajikin; Norazan Mohd Kassim; Abu Bakar Mohammad; Mohd Haniff Ibrahim
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 682 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0946-7076
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