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Electrically tuneable micromachined fabry-perot interferometer in gas analysis

✍ Scribed by Blomberg, M; Torkkeli, A; Lehto, A; Helenelund, Ch; Viitasalo, M

Book ID: 120658613
Publisher: Royal Swedish Academy of Sciences
Year: 1997
Tongue: English
Weight: 292 KB
Volume: T69
Category: Article
ISSN: 0031-8949
DOI: 10.1088/0031-8949/1997/T69/018

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