✦ LIBER ✦

Microhardness of (Ti,Al)N films deposited by reactive R.F. magnetron sputtering

✍ Scribed by Chi-Tung Huang; Jenq-Gong Duh

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Superhard nanocomposite Ti–Al–Si–N films

✍ Ning Jiang; Y.G. Shen; H.J. Zhang; S.N. Bao; X.Y. Hou 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 405 KB

Deposition of (Ti,Al)N films on A2 tool

✍ Chi-Tung Huang; Jenq-Gong Duh 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 684 KB

Silicate glass films deposited by reacti

✍ G. Della Mea; V. Rigato; P. Colombo; R. Dal Maschio; C. Sighel; S. Zandolin; P.K 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 421 KB

Nanocomposite Ti–Si–N films deposited by

✍ Ning Jiang; Y.G Shen; Y.-W Mai; Tai Chan; Simon C Tung 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 356 KB

Deposition of molybdenum nitride thin fi

✍ V.P. Anitha; S. Major; D. Chandrashekharam; Mukesh Bhatnagar 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 597 KB

Reactive R.F. magnetron sputtering depos

✍ Céline Lemire; Dave B.B. Lollman; Ahmad Al Mohammad; Eveline Gillet; Khalifa Agu 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 410 KB