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Microhardness of non-stoichiometric TiCx, plates prepared by chemical vapour deposition

✍ Scribed by C.-C. Jiang; T. Goto; T. Hirai


Book ID
116018119
Publisher
Elsevier Science
Year
1990
Weight
476 KB
Volume
163
Category
Article
ISSN
0022-5088

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Structure and properties of TiCx layers
✍ Ch. TΓ€schner; A. Leonhardt; M. SchΓΆnherr; E. Wolf; J. Henke πŸ“‚ Article πŸ“… 1991 πŸ› Elsevier Science 🌐 English βš– 433 KB

The preparation of hard coatings on hard metal substrates (WC/Co) using a d.c.-plasma glow discharge method is described. The TiC, coatings were deposited from the gas phase with starting gases TiCI4, hydrogen, argon and a carbon source (benzene or n-heptane). The deposition temperature was chosen a