✦ LIBER ✦

Preparation of amorphous Si3N4-C plate by chemical vapour deposition

✍ Scribed by Toshio Hirai; Takashi Goto

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

D.C. electrical conductivity of amorphou

✍ Takashi Goto; Toshio Hirai 📂 Article 📅 1983 🏛 Springer 🌐 English ⚖ 476 KB

Hydrogenated amorphous Si-C alloy prepar

✍ A. Yoshida; Y. Yamada; T. Nakamura; H. Yonezu 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 177 KB

High temperature evaporation characteris

✍ Takashi Goto; Toshio Hirai 📂 Article 📅 1987 🏛 Springer 🌐 English ⚖ 493 KB

Etching of chemically vapour-deposited a

✍ Takashi Goto; Toshio Hirai 📂 Article 📅 1983 🏛 Springer 🌐 English ⚖ 919 KB

Rapid chemical vapour-deposition of Si3N

✍ Toshio Hirai; Koichi Niihara; Takashi Goto 📂 Article 📅 1977 🏛 Springer 🌐 English ⚖ 164 KB

Dielectric properties of chemically vapo

✍ Takashi Goto; Toshio Hirai 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 520 KB