✦ LIBER ✦

Etching of chemically vapour-deposited amorphous Si3N4-C composites in HF solution

✍ Scribed by Takashi Goto; Toshio Hirai

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thermal conductivity of chemically vapou

✍ Shinsuke Hayashi; Toshio Hirai 📂 Article 📅 1983 🏛 Springer 🌐 English ⚖ 499 KB

D.C. electrical conductivity of amorphou

✍ Takashi Goto; Toshio Hirai 📂 Article 📅 1983 🏛 Springer 🌐 English ⚖ 476 KB

Preparation of amorphous Si3N4-C plate b

✍ Toshio Hirai; Takashi Goto 📂 Article 📅 1981 🏛 Springer 🌐 English ⚖ 730 KB

High temperature evaporation characteris

✍ Takashi Goto; Toshio Hirai 📂 Article 📅 1987 🏛 Springer 🌐 English ⚖ 493 KB

Density and deposition rate of chemicall

✍ Toshio Hirai; Shinsuke Hayashi 📂 Article 📅 1983 🏛 Springer 🌐 English ⚖ 387 KB

Dry etching of low-temperature chemicall

✍ R. Bantoiu; C. Pavelescu; V. Avramescu 📂 Article 📅 1991 🏛 Springer 🌐 English ⚖ 208 KB