Microanalyses on the hydrogen permeated 70% SiCC films
✍ Scribed by N.K. Huang; D.Z. Wang; Y.G. Liu; J.R. Liu
- Book ID
- 113785115
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 183 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0025-5408
No coin nor oath required. For personal study only.
📜 SIMILAR VOLUMES
70% SiC-C films were prepared with magnetron sputtering deposition followed by Ar + ion bombardment. Hydrogen was then introduced to these films with ion implantation and permeation techniques for a comparison. Infrared (IR) transmission measurements were performed to analyze the hydrogen-related vi
## Abstract We study the influence of the growth conditions on the residual strain and related optical and structural properties in the case of 3C‐SiC films grown on (001) silicon substrates. We show that two possible mechanisms compete to manage the final sample bow: one is by controlling the comp