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XPS study of hydrogen permeation effect on SiC–C films

✍ Scribed by N.K. Huang; D.Z. Wang; Q. Xiong; B. Yang

Book ID
114167293
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
165 KB
Volume
207
Category
Article
ISSN
0168-583X

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XPS study of BN thin films deposited by
XPS study of BN thin films deposited by CVD on SiC plane substrates
✍ C. Guimon; D. Gonbeau; G. Pfister-Guillouzo; O. Dugne; A. Guette; R. Naslain; M. 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 498 KB

## Abstract BN films deposited from a BF~3~NH~3~ precursor, under chemical vapour infiltration conditions, on plane sintered α‐SiC substrates were analysed by XPS. The films are non‐stoichiometric with an N/B atomic ratio of <1. They also contain significant amounts of oxygen atoms, homogeneously