✦ LIBER ✦

Micro wire EDM for high aspect ratio 3D microstructuring of ceramics and metals

✍ Scribed by A. Schoth; R. Förster; W. Menz

Publisher: Springer-Verlag
Year: 2005
Tongue: English
Weight: 399 KB
Volume: 11
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-004-0399-y

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High-aspect-ratio WC-Co microstructure p

High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDM

✍ K. Takahata; N. Shibaike; H. Guckel 📂 Article 📅 2000 🏛 Springer-Verlag 🌐 English ⚖ 208 KB

High aspect ratio micro tool manufacturi

High aspect ratio micro tool manufacturing for polymer replication using μEDM of silicon, selective etching and electroforming

✍ G. Tosello; G. Bissacco; P. T. Tang; H. N. Hansen; P. C. Nielsen 📂 Article 📅 2008 🏛 Springer-Verlag 🌐 English ⚖ 516 KB

Fabrication of 3D Metal Microstructures

Fabrication of 3D Metal Microstructures Using a Hybrid Process of Micro-EDM and Laser Assembly

✍ C.-L. Kuo; J.-D. Huang; H.-Y., Liang; J.-D. Huang 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 208 KB

An Epoxy Photoresist Modified by Lumines

An Epoxy Photoresist Modified by Luminescent Nanocrystals for the Fabrication of 3D High-Aspect-Ratio Microstructures

✍ C. Ingrosso; V. Fakhfouri; M. Striccoli; A. Agostiano; A. Voigt; G. Gruetzner; M 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 430 KB 👁 2 views

Application of UV depth lithography and

Application of UV depth lithography and 3D-microforming for high aspect ratio electromagnetic microactuator components

✍ T. Kohlmeier; V. Seidemann; S. Büttgenbach; H. H. Gatzen 📂 Article 📅 2002 🏛 Springer-Verlag 🌐 English ⚖ 168 KB

High aspect ratio via metallization for

High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed

✍ G. Druais; G. Dilliway; P. Fischer; E. Guidotti; O. Lühn; A. Radisic; S. Zahraou 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 942 KB