✦ LIBER ✦
Application of UV depth lithography and 3D-microforming for high aspect ratio electromagnetic microactuator components
✍ Scribed by T. Kohlmeier; V. Seidemann; S. Büttgenbach; H. H. Gatzen
- Publisher
- Springer-Verlag
- Year
- 2002
- Tongue
- English
- Weight
- 168 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0946-7076
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