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MgO thin film deposition using TVA (thermoionic vacuum arc)

✍ Scribed by H. Ehrich; G. Musa; A. Popescu; I. Mustata; A. Salabas; M. Cretu; G.F. Leu


Book ID
114086640
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
301 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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In this study, magnesium thin films were deposited on glass substrate by the Thermionic Vacuum Arc (TVA) technique for the first time. We present a different technique for deposition of high-quality magnesium thin films. By means of this technique, the production of films is achieved by condensing t