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Boron thin film deposition by using Thermionic Vacuum Arc (TVA) technology

✍ Scribed by T. Akan; N. Ekem; S. Pat; U.G. Issever; M.Z. Balbag; M.I. Cenik; R. Vladoiu; G. Musa


Book ID
113789988
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
303 KB
Volume
61
Category
Article
ISSN
0167-577X

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In this study, magnesium thin films were deposited on glass substrate by the Thermionic Vacuum Arc (TVA) technique for the first time. We present a different technique for deposition of high-quality magnesium thin films. By means of this technique, the production of films is achieved by condensing t