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MgB2 films prepared by rapid annealing method

✍ Scribed by Qian Dai; Xiangdong Kong; Qingrong Feng; Qianqian Yang; Huai Zhang; Ruijuan Nie; Li Han; Yanwei Ma; Furen Wang


Book ID
113850730
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
344 KB
Volume
475
Category
Article
ISSN
0921-4534

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Thin CNx films prepared by vacuum rapid
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The properties of thin CN x layers prepared by rapid thermal annealing (RTA) are compared with CN x layers obtained from N 2 plasma treatment. Carbon films of 6000 A ˚thickness were deposited by magnetron sputtering system on p-type silicon substrates. The samples were treated in an RTA system in N