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Methods of creation and effect of microwave plasmas upon the etching of polymers and silicon

✍ Scribed by J. Paraszczak; J. Heidenreich; M. Hatzakis; M. Moisan

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 888 KB
Volume: 3
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(85)90050-4

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