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Ion energy and anisotropy in microwave plasma etching of polymers

✍ Scribed by J.E. Heidenreich; J.R. Paraszczak; M. Moisan; G. Sauve

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 559 KB
Volume: 5
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(86)90065-1

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