Controlling the size of InAs quantum dot
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Kenichi Kawaguchi; Hiroji Ebe; Mitsuru Ekawa; Akio Sugama; Yasuhiko Arakawa
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Article
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2009
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Elsevier Science
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English
⚖ 466 KB
The formation of III-V InAs quantum dots (QDs) on group-IV Si 1-x Ge x /Si(0 0 1) was investigated by metalorganic vapor-phase epitaxy. Two types of QDs, round-shaped QDs and giant QDs elongated in the [1 1 0] or [1,-1,0] direction, were observed in a growth condition of low V/III ratios. An increas