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Metalorganic vapor phase epitaxy growth of (InxGa1-xN/GaN)n layered structures and reduction of indium droplets

โœ Scribed by Masaya Shimizu; Kazumasa Hiramatsu; Nobuhiko Sawaki


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
324 KB
Volume
145
Category
Article
ISSN
0022-0248

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Growth of GaN Layers by One-, Two-, and
โœ Ohkawa, K. ;Hirako, A. ;Yoshitani, M. ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 201 KB ๐Ÿ‘ 2 views

Subject classification: 73.61.Ey; 81.15.Kk; S7.14 One-, two-and three-flow metalorganic vapor phase epitaxy (MOVPE) methods have been compared in GaN growth, and each growth is analyzed by computational fluid dynamics (CFD). It is found that two-flow method shows better growth condition for achievin