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Metal-Organic CVD of Conductive and Crystalline Hafnium Nitride Films

✍ Scribed by Y. Kim; A. Baunemann; H. Parala; A. Devi; R. A. Fischer

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 292 KB
Volume: 11
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200504204

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