✦ LIBER ✦
HfO2 and Hf1–xSixO2 Thin Films Grown by Metal-Organic CVD Using Tetrakis(diethylamido)hafnium
✍ Scribed by Y. Ohshita; A. Ogura; M. Ishikawa; T. Kada; A. Hoshino; T. Suzuki; H. Machida; K. Soai
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 258 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0948-1907
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