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Metal Organic CVD of Cobalt Thin Films Using Cobalt Tricarbonyl Nitrosyl

✍ Scribed by Penelope A. Lane; Peter E.Oliver; Peter J. Wright; Christopher L. Reeves; Anthony D. Pitt; Brian Cockayne

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 300 KB
Volume: 04
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199810)04:05<183::aid-cvde183>3.0.co;2-m

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