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Layer-by-Layer Growth of GeSbTe Thin Films by Metal-Organic CVD for Phase Change Memory Applications

✍ Scribed by Ran-Young Kim; Ho-Gi Kim; Kyoung-Woo Park; Jun-Ku Ahn; Soon-Gil Yoon


Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
277 KB
Volume
15
Category
Article
ISSN
0948-1907

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