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Metal layer mask patterning by force microscopy lithography

✍ Scribed by H.D. Fonseca Filho; M.H.P. Maurício; C.R. Ponciano; R. Prioli

Book ID
104062003
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
197 KB
Volume
112
Category
Article
ISSN
0921-5107

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