Atomic force microscopy study of micrometric pattern replica by hot embossing lithography

✍ Scribed by Laurence Ressier; Christel Martin; Jean Pierre Peyrade

• Book ID: 108207334
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 235 KB
• Volume: 71
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.01.036