Atomic force microscopy characterization of the chemical contrast of nanoscale patterns fabricated by electron beam lithography on polyethylene glycol oxide thin films

✍ Scribed by Lucel Sirghi; Frederic Bretagnol; Stéphane Mornet; Takao Sasaki; Douglas Gilliland; Pascal Colpo; Francois Rossi

• Book ID: 108291759
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 909 KB
• Volume: 109
• Category: Article
• ISSN: 0304-3991
• DOI: 10.1016/j.ultramic.2008.10.022