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Surface patterning by heavy ion lithography using self-assembled colloidal masks

✍ Scribed by M. Skupiński; R. Sanz; J. Jensen

Book ID: 103861903
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 725 KB
Volume: 257
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.01.099

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